MoTa sputtering targets..-ShenZhen Sunrise Metal Industry CO., LTD

MoTa sputtering targets. Outstanding corrosion resistance.

The most important facts
Density [%]	≥ 99.5
Purity [%]	> 99.97
Coefficient of thermal expansion [ppm/K]	5.34
Thermal conductivity [W/(m· K)]	97
Electrical conductivity [MS/m]	13
Microstructure	fine-grained, homogeneous

High density.

 Sunrise Metal  use hot forming processes to compact our MoTa sputtering targets to 99.5 %and more. The benefit to you: Particularly high conductivity in the layer and rapid sputtering due to high deposition rates.

Outstanding purity.

Metallic and gaseous impurities in the sputtering target are reproduced almost 1:1 in the sputtered functional layer and result in particle formation during the PVD process.  Sunrise Metal  guarantee that our MoTa targets have a purity of at least 99.97 %.

Unbeatable corrosion resistance.

 Sunrise Metal  dope pure molybdenum with small quantities of the extremely corrosion-resistant element, tantalum. In this way, we are able to combine the beneficial properties of the two metals. MoTa has proven its corrosion resistance in numerous tests.

Etched thin films (thickness: 300 nm) of molybdenum and MoTa after different exposure times at 60 °C and 90 % relative humidity:

Molybdenum
Exposure: 0 h

Molybdenum
Exposure: 50 h

Molybdenum
Exposure: 100 h

MoTa
Exposure: 0 h

MoTa
Exposure: 50 h

MoTa:
Exposure: 100 h

Reliable etching results.

MoTa is particularly quick and easy to structure. The taper angle of MoTa is 45°. In contrast, at 90°, this angle is very steep in competing products offering a similar level of corrosion resistance. Any functional layers that are subsequently applied are not able to optimally cover these steep inclines. This can result in fissures and short-circuits.

Shenzhen Sunrise Metal Industry Co.,Ltd

TEL：0086-0755-27185042 
Website：http://www.sunriseta.com
E-Mail：sales@sunriseta.com